Growth and characteristics of β-Ga2O3 thin films on sapphire (0001) by low pressure chemical vapour deposition
Yujia Jiao, Qian Jiang, Junhua Meng, Jinliang Zhao, Zhigang Yin, Hongli Gao, Jing Zhang, Jinxiang Deng, Xingwang Zhang
Topics & Concepts
SapphireChemical vapor depositionThin filmMaterials scienceDeposition (geology)Combustion chemical vapor depositionAnalytical Chemistry (journal)Chemical engineeringCarbon filmOptoelectronicsChemistryNanotechnologyEnvironmental chemistryOpticsGeologyPhysicsLaserEngineeringSedimentPaleontologyGa2O3 and related materialsAdvanced Photocatalysis TechniquesZnO doping and properties