Multi-scale micro-nano structures prepared by laser cleaning assisted laser ablation for broadband ultralow reflectivity silicon surfaces in ambient air
Tong Chen, Wenjun Wang, Tao Tao, Aifei Pan, Xuesong Mei
Topics & Concepts
Materials scienceLaserSiliconOptoelectronicsOpticsLaser ablationFemtosecondAbsorption (acoustics)PhysicsComposite materialLaser Material Processing TechniquesLaser-Ablation Synthesis of NanoparticlesOptical Coatings and Gratings