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Microhotplates based on Pt and Pt-Rh films: The impact of composition, structure, and thermal treatment on functional properties

И.А. Калинин, Ilya V. Roslyakov, Dmitry Tsymbarenko, D. A. Bograchev, Valeriy Krivetskiy, Kirill S. Napolskii

2020Sensors and Actuators A Physical30 citationsDOI

Topics & Concepts

Materials scienceAnnealing (glass)PorosityRhodiumThermal expansionAlloyChemical engineeringThermal shockRecrystallization (geology)Resistive touchscreenThermal stabilityComposite materialMetallurgyCatalysisChemistryElectrical engineeringBiochemistryPaleontologyEngineeringBiologyGas Sensing Nanomaterials and SensorsAdvanced Sensor Technologies ResearchTransition Metal Oxide Nanomaterials
Microhotplates based on Pt and Pt-Rh films: The impact of composition, structure, and thermal treatment on functional properties | Litcius