Hybrid integrated Si<sub>3</sub>N<sub>4</sub> external cavity laser with high power and narrow linewidth
Chen Chen, Fang Wei, Xiuyou Han, Qingshuai Su, Haoyang Pi, Guofeng Xin, Huimin Wu, Anton Stroganov, Yanguang Sun, Weijie Ren, Xiao Chen, Qing Ye, Haiwen Cai, Weibiao Chen
Abstract
We have designed and fabricated a hybrid integrated laser source with full C-band wavelength tunability and high-power output. The external cavity laser is composed of a gain chip and a dual micro-ring narrowband filter integrated on the silicon nitride photonic chip to achieve a wavelength tuning range of 55 nm and a SMSR higher than 50 dB. Through the integration of the semiconductor optical amplifier in the miniaturized package, the laser exhibits an output power of 220 mW and linewidth narrower than 8 kHz over the full C-band. Such a high-power, narrow-linewidth laser diode with a compact and low-cost design could be applied whenever coherence and interferometric resolutions are needed, such as silicon optical coherent transceiver module for space laser communication, light detection and ranging (LiDAR).