Investigation of temperature-dependent ferroelectric properties of Y-doped HfO2 thin film prepared by medium-frequency reactive magnetron co-sputtering
Yu Zhang, Jun Xu, Chi‐Kyu Choi, Zhenxing Fang, Ping Li, Longfei Yuan, Lei Chen
Topics & Concepts
Materials scienceFerroelectricityThin filmAnalytical Chemistry (journal)Sputter depositionDopingAnnealing (glass)SputteringOptoelectronicsDielectricChemistryNanotechnologyComposite materialChromatographyFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesMXene and MAX Phase Materials