Optimization of three-dimensional traveling wave drive for a PZT thin-film micro-motor based on stiffness tuning of the supporting structure
Tianyu Yang, Binlei Cao, Yu Chen, Xiaoshi Li, Jiangbo He, Wei Su
Topics & Concepts
Materials scienceStiffnessStatorLead zirconate titanateFlatness (cosmology)Control theory (sociology)Rotor (electric)MechanicsComposite materialComputer scienceMechanical engineeringPhysicsEngineeringDielectricCosmologyOptoelectronicsArtificial intelligenceQuantum mechanicsControl (management)FerroelectricityPiezoelectric Actuators and ControlForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing Techniques