Atomic layer deposition of titanium oxide and nitride on vertically aligned carbon nanotubes for energy dense 3D microsupercapacitors
Hayley Zhang, Ben Wang, Billyde Brown
Topics & Concepts
Materials scienceAtomic layer depositionConformal coatingTitanium nitrideTitaniumTinCoatingCarbon nanotubeNanotechnologyTin oxideNitrideLayer (electronics)Titanium oxideChemical engineeringOxideMetallurgyEngineeringSupercapacitor Materials and FabricationAdvancements in Battery MaterialsMXene and MAX Phase Materials