Characterization analysis of quality factor, electro-mechanical coupling and spurious modes for AlN Lamb-wave resonators with f > 2 GHz
Shitao Lv, Zheng Zhu, Fei Long, Haiyan Sun, Chenguang Song, Aoyu Zhang, Fazeng Tan, Jicong Zhao
Topics & Concepts
ResonatorSpurious relationshipCoupling (piping)Q factorQuality (philosophy)Materials scienceCharacterization (materials science)OptoelectronicsAcousticsPhysicsComputer scienceComposite materialNanotechnologyMachine learningQuantum mechanicsAcoustic Wave Resonator TechnologiesMechanical and Optical ResonatorsAdvanced MEMS and NEMS Technologies