Nitrogen rich PECVD silicon nitride for passivation of Si and AlGaN/GaN HEMT devices
Khawaja Nizammuddin Subhani, Nayana Remesh, S Niranjan, Srinivasan Raghavan, R. Muralidharan, Digbijoy N. Nath, K.N. Bhat
Topics & Concepts
PassivationMaterials sciencePlasma-enhanced chemical vapor depositionHigh-electron-mobility transistorSilicon nitrideOptoelectronicsNitrideChemical vapor depositionSiliconTransistorLayer (electronics)NanotechnologyElectrical engineeringVoltageEngineeringGaN-based semiconductor devices and materialsSemiconductor materials and devicesThin-Film Transistor Technologies