All-carbocycle hydrocarbon thermosets with high thermal stability and robust mechanical strength for low-<i>k</i>interlayer dielectrics
Yudi Feng, Ke Jin, Jia Guo, Changchun Wang
Abstract
Two kinds of hydrocarbon precursors were synthesized and cured at elevated temperatures to give cross-linked all-aliphatic/aromatic-ring polymers with a low dielectric constant for next-generation interlayer dielectrics.
Topics & Concepts
DielectricThermosetting polymerHydrocarbonThermal stabilityMaterials sciencePolymerMechanical strengthRing (chemistry)Composite materialChemical engineeringPolymer chemistryOrganic chemistryChemistryOptoelectronicsEngineeringSynthesis and properties of polymersTribology and Wear AnalysisSilicone and Siloxane Chemistry