Synthesis of Co(OH)F@Al nanobelt array on various substrates for pyro-MEMS
Yuxiang Li, Xi Chen, Lei Zhang, Ruishan Han, Iftikhar Hussain, Xiaoxia Ma, Kaili Zhang, Kaili Zhang
Topics & Concepts
Materials scienceChemical engineeringMicroelectromechanical systemsPassivationOxideNanotechnologyFluorineFabricationEtching (microfabrication)Layer (electronics)MetallurgyMedicinePathologyEngineeringAlternative medicineEnergetic Materials and CombustionBoron and Carbon Nanomaterials ResearchAdvanced ceramic materials synthesis