Optimization of the Deposition Process Parameters of DC Magnetron Sputtering to Achieve Desired Deposition Rate Using Design of Experiment Method
Allamula Ashok, Vir Karan, Peela Lasya, Daljin Jacob, Parasuraman Swaminathan, Satyesh Kumar Yadav
Topics & Concepts
Taguchi methodsSputter depositionSputteringDeposition (geology)Materials scienceSurface roughnessCavity magnetronThin filmAnnealing (glass)OptoelectronicsComposite materialNanotechnologyGeologySedimentPaleontologyNanofabrication and Lithography TechniquesNanomaterials and Printing TechnologiesMetal and Thin Film Mechanics