Design, fabrication and characterization of TiN sensing film-based ISFET pH sensor
Soumendu Sinha, Tapas Pal, Dhirendra Kumar, Rishi Sharma, D. K. Kharbanda, P. K. Khanna, Ravindra Mukhiya
Topics & Concepts
ISFETMaterials scienceFabricationTinTitanium nitrideHysteresisAnalytical Chemistry (journal)SputteringSputter depositionNitrideOptoelectronicsThin filmNanotechnologyTransistorField-effect transistorLayer (electronics)VoltageMetallurgyElectrical engineeringChromatographyChemistryPathologyPhysicsQuantum mechanicsEngineeringAlternative medicineMedicineAnalytical Chemistry and SensorsAcoustic Wave Resonator TechnologiesDiamond and Carbon-based Materials Research