Heteroepitaxial growth of α-Ga2O3 thin films on a-, c- and r-plane sapphire substrates by low-cost mist-CVD method
Yaolin Cheng, Yu Xu, Zhe Li, Jiaqi Zhang, Dazheng Chen, Qian Feng, Shengrui Xu, Hong Zhou, Jincheng Zhang, Yue Hao, Chunfu Zhang
Topics & Concepts
SapphireMaterials scienceEpitaxyCrystallinityFull width at half maximumBand gapThin filmX-ray photoelectron spectroscopySemiconductorLattice constantOptoelectronicsSubstrate (aquarium)Analytical Chemistry (journal)CrystallographyOpticsNanotechnologyDiffractionChemistryChemical engineeringComposite materialPhysicsLaserGeologyLayer (electronics)EngineeringChromatographyOceanographyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques