Research on adhesion strength and optical properties of SiC films obtained via RF magnetron sputtering
Yizhe Wang, Zha-ma Tuofu, Zhenming Yue, Hui Sun, Jianhong Gong, Jun Gao
Topics & Concepts
Materials scienceTransmittanceThin filmAmorphous solidComposite materialSputter depositionLayer (electronics)SputteringComposite numberOptoelectronicsNanotechnologyCrystallographyChemistryDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesCopper Interconnects and Reliability