Fabrication of high-aspect-ratio fused silica microstructures with large depths using Bessel-beam femtosecond laser-assisted etching
Yunpeng Song, Jian Xu, Zhaoxiang Liu, Aodong Zhang, Jianping Yu, Jia Qi, Wei Chen, Ya Cheng
Topics & Concepts
Materials scienceFemtosecondFabricationBessel beamOpticsLaserEtching (microfabrication)Isotropic etchingGaussian beamBeam (structure)OptoelectronicsLayer (electronics)Composite materialAlternative medicinePhysicsMedicinePathologyLaser Material Processing TechniquesPhotonic Crystals and ApplicationsAdvanced Surface Polishing Techniques