The bottleneck and innovation key of MEMS-based metal oxide semiconductors gas sensor for petrochemical industry
Yuxin Zhao
Topics & Concepts
BottleneckPetrochemicalKey (lock)Microelectromechanical systemsSemiconductor industryOxideSemiconductorMaterials scienceNanotechnologyEngineeringProcess engineeringManufacturing engineeringEmbedded systemWaste managementOptoelectronicsComputer scienceMetallurgyComputer securityGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors