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The bottleneck and innovation key of MEMS-based metal oxide semiconductors gas sensor for petrochemical industry

Yuxin Zhao

2024Chemical Engineering Journal31 citationsDOI

Topics & Concepts

BottleneckPetrochemicalKey (lock)Microelectromechanical systemsSemiconductor industryOxideSemiconductorMaterials scienceNanotechnologyEngineeringProcess engineeringManufacturing engineeringEmbedded systemWaste managementOptoelectronicsComputer scienceMetallurgyComputer securityGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors
The bottleneck and innovation key of MEMS-based metal oxide semiconductors gas sensor for petrochemical industry | Litcius