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Effect of core-diameters and shell-thicknesses of Fe3O4/SiO2 composite abrasives on the performance of ultrasound-assisted magnetorheological polishing for sapphire

Quan Zhai, Wenjie Zhai, Bo Gao, Yiqing Shi, Xi Cheng

2021Colloids and Surfaces A Physicochemical and Engineering Aspects36 citationsDOI

Topics & Concepts

Materials scienceAbrasiveSapphireComposite numberWaferComposite materialPolishingMagnetorheological fluidSlurrySurface roughnessChemical-mechanical planarizationCore (optical fiber)Shell (structure)NanotechnologyOpticsMagnetic fieldLaserQuantum mechanicsPhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications
Effect of core-diameters and shell-thicknesses of Fe3O4/SiO2 composite abrasives on the performance of ultrasound-assisted magnetorheological polishing for sapphire | Litcius