Effect of core-diameters and shell-thicknesses of Fe3O4/SiO2 composite abrasives on the performance of ultrasound-assisted magnetorheological polishing for sapphire
Quan Zhai, Wenjie Zhai, Bo Gao, Yiqing Shi, Xi Cheng
Topics & Concepts
Materials scienceAbrasiveSapphireComposite numberWaferComposite materialPolishingMagnetorheological fluidSlurrySurface roughnessChemical-mechanical planarizationCore (optical fiber)Shell (structure)NanotechnologyOpticsMagnetic fieldLaserQuantum mechanicsPhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications