Formation mechanism of concave and convex surface shapes in double-sided lapping
Bo Pan, Renke Kang, Xu Zhu, Dongxing Du, Wen Huang, Jiang Guo
Topics & Concepts
Flatness (cosmology)LappingRegular polygonMaterials scienceSurface (topology)Mechanism (biology)KinematicsWaferGeometryEccentricity (behavior)OpticsMathematicsPhysicsComposite materialClassical mechanicsNanotechnologyPolitical scienceCosmologyLawQuantum mechanicsAdvanced Surface Polishing TechniquesAdhesion, Friction, and Surface InteractionsTribology and Lubrication Engineering