Reduction of copper surface oxide using a sub-atmospheric dielectric barrier discharge plasma
Viktor Udachin, Lienhard Wegewitz, Sebastian Dahle, Wolfgang Maus‐Friedrichs
Topics & Concepts
X-ray photoelectron spectroscopyOxideDielectric barrier dischargeCopperAnalytical Chemistry (journal)Materials scienceCopper oxideSurface roughnessPlasmaHydrogenPlasma cleaningOxygenDielectricSurface finishChemical engineeringChemistryMetallurgyComposite materialOrganic chemistryPhysicsChromatographyEngineeringQuantum mechanicsOptoelectronicsCopper-based nanomaterials and applicationsSemiconductor materials and devicesZnO doping and properties