Spatially resolved MoO<sub>x</sub> phases by the laser oxidation of MoO<sub>2</sub>: a possible route for all-molybdenum oxide devices
O. de Melo, F. Agulló‐Rueda, V. Torres‐Costa
Abstract
MoO<sub>2</sub> thin films were subjected to a laser localized oxidation process that allowed to obtain different well defined and spatially resolved MoO<sub>x</sub> phases.
Topics & Concepts
Materials scienceMolybdenumOxideLaserMolybdenum oxideOxidation processThin filmInorganic chemistryChemical engineeringMetallurgyOpticsNanotechnologyEngineeringChemistryPhysicsTransition Metal Oxide NanomaterialsAdvanced Memory and Neural ComputingSemiconductor materials and devices