Litcius/Paper detail

Scalable manufacturing of high-index atomic layer–polymer hybrid metasurfaces for metaphotonics in the visible

Joohoon Kim, Junhwa Seong, Wonjoong Kim, Gun‐Yeal Lee, Seokwoo Kim, Hongyoon Kim, Seong‐Won Moon, Dong Kyo Oh, Younghwan Yang, Jeonghoon Park, Jaehyuck Jang, Yeseul Kim, Minsu Jeong, Chanwoong Park, Hojung Choi, Gyoseon Jeon, Kyung-il Lee, Dong Hyun Yoon, Namkyoo Park, Byoungho Lee, Heon Lee, Junsuk Rho

2023Nature Materials265 citationsDOI

Topics & Concepts

Materials scienceNanoimprint lithographyWaferLithographyImmersion lithographyNanotechnologyOptoelectronicsFabricationPhotolithographyUltravioletThroughputResistComputer scienceLayer (electronics)TelecommunicationsAlternative medicineWirelessPathologyMedicineMetamaterials and Metasurfaces ApplicationsPhotonic Crystals and ApplicationsAdvanced Antenna and Metasurface Technologies