Reactive pulsed DC magnetron sputtering deposition of vanadium oxide thin films: Role of pulse frequency on the film growth and properties
Xiang Dong, Yuanjie Su, Zhiming Wu, Xiangdong Xu, Zihao Xiang, Yuanlin Shi, Wenyu Chen, Jinhong Dai, Zhangying Huang, Tao Wang, Yadong Jiang
Topics & Concepts
Materials scienceThin filmSputteringVanadium oxideVanadiumPulsed DCMicrobolometerSputter depositionDeposition (geology)MicrostructureStoichiometryCavity magnetronOptoelectronicsOxideHigh-power impulse magnetron sputteringAnalytical Chemistry (journal)Chemical engineeringNanotechnologyComposite materialMetallurgyOpticsChemistryBolometerOrganic chemistrySedimentDetectorBiologyEngineeringPaleontologyPhysicsChromatographyTransition Metal Oxide NanomaterialsZnO doping and propertiesGas Sensing Nanomaterials and Sensors