Redeposition mechanism on silicon oxide layers during selective etching process in 3D NAND manufacture
Zihan Zhou, Yunwen Wu, Huiqin Ling, Jie Guo, Su Wang, Ming Li
Topics & Concepts
Etching (microfabrication)Layer (electronics)WaferMaterials scienceOxideChemical engineeringSilicon oxideSiliconTernary operationNanotechnologyOptoelectronicsMetallurgyComputer scienceSilicon nitrideEngineeringProgramming languageCatalytic Processes in Materials ScienceAdvanced Data Storage TechnologiesPhotonic Crystals and Applications