Investigation of β-Ga2O3 films and β-Ga2O3/GaN heterostructures grown by metal organic chemical vapor deposition
YaChao Zhang, Yifan Li, Zhizhe Wang, Rui Guo, Shengrui Xu, Chuanyang Liu, Shenglei Zhao, Jincheng Zhang, Yue Hao
Topics & Concepts
Metalorganic vapour phase epitaxyMaterials scienceHeterojunctionChemical vapor depositionEpitaxyOptoelectronicsSapphireX-ray photoelectron spectroscopyCrystal (programming language)NanotechnologyChemical engineeringLaserOpticsLayer (electronics)Programming languageEngineeringComputer sciencePhysicsGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques