Plasma-based isotropic etching polishing of synthetic quartz
Rulin Li, Yongjie Zhang, Yi Zhang, Peng Liu, Yaguo Li, Hui Deng
Topics & Concepts
Materials sciencePolishingPlasmaEtching (microfabrication)QuartzWaferInductively coupled plasmaIsotropyIsotropic etchingSurface roughnessReactive-ion etchingPassivationAnalytical Chemistry (journal)Layer (electronics)Composite materialOptoelectronicsOpticsChromatographyChemistryQuantum mechanicsPhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchSurface Modification and Superhydrophobicity