Epitaxial and large area Sb<sub>2</sub>Te<sub>3</sub>thin films on silicon by MOCVD
Martino Rimoldi, Raimondo Cecchini, Claudia Wiemer, Alessio Lamperti, Emanuele Longo, L. Nasi, L. Lazzarini, R. Mantovan, Massimo Longo
Abstract
Highly oriented antimony telluride thin films are prepared by room temperature metalorganic chemical vapor deposition on Si(111).
Topics & Concepts
Metalorganic vapour phase epitaxyEpitaxySiliconMaterials scienceOptoelectronicsAntimonyEngineering physicsNanotechnologyMetallurgyPhysicsLayer (electronics)Advanced Semiconductor Detectors and MaterialsChalcogenide Semiconductor Thin FilmsAdvanced Thermoelectric Materials and Devices