Effects of compound diamond slurry with graphene for lapping of sapphire wafers
Hsien‐Kuang Liu, Chao‐Chang A. Chen, Wen‐Chang Chen
Topics & Concepts
LappingMaterials scienceDiamondSlurryWaferSapphireGrapheneComposite materialChemical-mechanical planarizationSurface roughnessNanotechnologyPolishingOpticsLaserPhysicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics