Array structure of monocrystalline silicon surface processed by femtosecond laser machining assisted with anisotropic chemical etching
Q P Wang, Peng Yao, Dongkai Chu, Shuoshuo Qu, Wanying He, Xiangyue Xu, Hongtao Zhu, Bin Zou, Hanlian Liu, Chuanzhen Huang
Topics & Concepts
Materials scienceMonocrystalline siliconIsotropic etchingFemtosecondEtching (microfabrication)OpticsLaserOptoelectronicsSiliconGroove (engineering)NanotechnologyLayer (electronics)MetallurgyPhysicsAdvanced Surface Polishing TechniquesLaser Material Processing TechniquesPhotonic and Optical Devices