Development of a piezoelectric stick–slip actuator with controllable single-step forward and backward displacements for one-step fabrication of micro/nano hierarchical structures
Haoxiang Wu, Zhi Xu, Xuan Li, X.B. Zhang, Chunxue Yi, Hu Huang
Topics & Concepts
FabricationActuatorSlip (aerodynamics)PiezoelectricityNano-Materials scienceEngineeringComputer scienceNanotechnologyComposite materialArtificial intelligenceAerospace engineeringAlternative medicinePathologyMedicineAdvanced machining processes and optimizationPiezoelectric Actuators and ControlNanofabrication and Lithography Techniques