Quantum theory of electronic excitation and sputtering by transmission electron microscopy
Anthony Yoshimura, Michael Lamparski, Joel Giedt, David B. Lingerfelt, Jacek Jakowski, Panchapakesan Ganesh, Tao Yu, Bobby G. Sumpter, Vincent Meunier
Abstract
significantly increases their calculated sputtering cross sections and correctly yields appreciable sputtering rates at beam energies previously predicted to leave the crystals intact. The proposed QED-DFT approach can be easily extended to describe a rich variety of beam-driven phenomena in any crystalline material.
Topics & Concepts
SputteringExcitationAtomic physicsDensity functional theoryAtomic orbitalBeam (structure)ElectronElectronic structureMaterials scienceMolecular physicsPhysicsCondensed matter physicsQuantum mechanicsNanotechnologyThin filmOpticsElectronic and Structural Properties of OxidesGa2O3 and related materialsIon-surface interactions and analysis