Time response characteristics of a highly sensitive barometric pressure change sensor based on MEMS piezoresistive cantilevers
Ruka Wada, Hidetoshi Takahashi
Abstract
Abstract This paper describes the frequency characteristics of a highly sensitive barometric pressure change sensor. Here, we propose a method to measure pressure changes based on microelectromechanical systems piezoresistive cantilevers and an air chamber. The proposed sensor structure realizes a mechanical high pass filter to eliminate the influence of the barometric pressure change due to meteorological variations. The experimental frequency characteristics indicate that the proposed sensor unit with a high resolution of less than 0.1 Pa from 0.1 to 10 Hz responds to pressure changes with a high pass filter property according to the chamber volume size.
Topics & Concepts
Piezoresistive effectCantileverAtmospheric pressurePressure sensorMicroelectromechanical systemsMaterials scienceAcousticsVolume (thermodynamics)Filter (signal processing)Sensitivity (control systems)OptoelectronicsElectronic engineeringElectrical engineeringPhysicsComposite materialEngineeringMechanical engineeringMeteorologyQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Fiber Optic Sensors