Restricted hydrolysis reaction of Si3N4 via nonionic polymer adsorption in advanced shallow trench isolation chemical mechanical planarization

Kiho Bae, Kangchun Lee

2023Colloids and Surfaces A Physicochemical and Engineering Aspects14 citationsDOI

Topics & Concepts

Chemical-mechanical planarizationPassivationMaterials scienceChemical engineeringSlurryAdsorptionShallow trench isolationPolyvinyl alcoholPolymerHydrolysisNanoparticleWaferWettingNanotechnologyComposite materialLayer (electronics)Organic chemistryChemistryTrenchEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchIntegrated Circuits and Semiconductor Failure Analysis