On the influence of Ni(Pt)Si thin film formation on agglomeration threshold temperature and its impact on 3D imaging technology integration
M. Grégoire, Fabriziofranco Morris Anak, S. Verdier, Karen Dabertrand, S. Guillemin, D. Mangelinck
Topics & Concepts
SalicideMaterials scienceSilicideMicroelectronicsEconomies of agglomerationAnnealing (glass)Eutectic systemNanotechnologySiliconMetallurgyOptoelectronicsChemical engineeringMicrostructureEngineeringSemiconductor materials and interfacesSemiconductor materials and devicesSilicon and Solar Cell Technologies