A robust resonant controller design for MEMS-based multi-layered prestressed piezoelectric cantilever beam
Muhammad Haq Nawaz, Aron Michael, H. R. Pota, Daniel Ssu-Han Chen, Syed Mamun R Rasid
Topics & Concepts
CantileverMicroelectromechanical systemsSettling timeController (irrigation)Materials scienceControl theory (sociology)PiezoelectricityVoltageResidual stressAcousticsElectronic engineeringEngineeringStep responseOptoelectronicsComputer scienceControl engineeringPhysicsElectrical engineeringComposite materialControl (management)BiologyArtificial intelligenceAgronomyAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAeroelasticity and Vibration Control