Improvement of interfacial electrical properties of Au/ZrO2/Al2O3/TiN capacitors by reduction effect of Ar plasma treatment
Hyeongjun Kim, Haram Yang, Woongkyu Lee
Topics & Concepts
Materials scienceCapacitorTinPlasmaReduction (mathematics)Composite materialOptoelectronicsChemical engineeringMetallurgyElectrical engineeringVoltageQuantum mechanicsPhysicsMathematicsEngineeringGeometrySemiconductor materials and devicesAdvanced Memory and Neural ComputingFerroelectric and Negative Capacitance Devices