Atomic layer deposition of palladium coated TiO2/Si nanopillars: ToF-SIMS, AES and XPS characterization study
Igor Iatsunskyi, Gloria Gottardi, V. Micheli, R. Canteri, Emerson Coy, Mikhaël Bechelany
Topics & Concepts
X-ray photoelectron spectroscopyNanopillarMaterials scienceAnalytical Chemistry (journal)Auger electron spectroscopyRutherford backscattering spectrometryAtomic layer depositionSputteringSecondary ion mass spectrometryLayer (electronics)Chemical engineeringNanotechnologyThin filmChemistryNanostructureMass spectrometryEngineeringChromatographyNuclear physicsPhysicsZnO doping and propertiesQuantum Dots Synthesis And PropertiesElectronic and Structural Properties of Oxides