Effect of modulation ratio on microstructure and tribological properties of TiAlN/TiAlCN multilayer coatings prepared by multi-excitation source plasma
Bing Zhou, Yiming Wang, Zhubo Liu, Jiaqi Zhi, Hui Sun, Yongsheng Wang, Yanxia Wu, Hongjun Hei, Shengwang Yu
Topics & Concepts
Materials scienceMicrostructureAmorphous solidNanoindentationNanocrystalline materialSputter depositionRaman spectroscopyScanning electron microscopeComposite materialCoatingTribologyX-ray photoelectron spectroscopyAmorphous carbonSputteringAnalytical Chemistry (journal)Thin filmChemical engineeringCrystallographyNanotechnologyOpticsChemistryEngineeringChromatographyPhysicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research