Structure and gas separation properties of ultra-smooth PE-CVD silicon organic coated composite membranes
Lara Kleines, Stefan Wilski, Philipp Alizadeh, Jens Rubner, Matthias Weßling, Christian Hopmann, Rainer Dahlmann
Topics & Concepts
Materials scienceMembraneGas separationComposite numberSiliconChemical engineeringComposite materialNanotechnologyOptoelectronicsBiologyEngineeringGeneticsMembrane Separation and Gas TransportCopper Interconnects and ReliabilitySemiconductor materials and devices