Polymeric electronic materials for microelectronics manufacturing: A review
Qinghuang Lin
Topics & Concepts
PhotoresistMaterials scienceMicroelectronicsNanotechnologyLithographyDielectricWaferResistElectronic materialsNanoporousSemiconductorIntegrated circuitEngineering physicsOptoelectronicsEngineeringLayer (electronics)Copper Interconnects and ReliabilitySemiconductor materials and devicesNanofabrication and Lithography Techniques