Synthesis of hard diamond-like carbon films by double-pulse high-power impulse magnetron sputtering
Takashi Kimura, Kento Sakai
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceX-ray photoelectron spectroscopyAnalytical Chemistry (journal)Sputter depositionDiamond-like carbonPlasmaSputteringChemistryThin filmNanotechnologyNuclear magnetic resonancePhysicsQuantum mechanicsChromatographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsForce Microscopy Techniques and Applications