A novel compliant mechanism based system to calibrate spring constant of AFM cantilevers
Yanling Tian, Chongkai Zhou, Fujun Wang, Zhilai Lu, Dawei Zhang
Topics & Concepts
CantileverCalibrationSpring (device)ActuatorMechanism (biology)Displacement (psychology)Suspension (topology)Compliant mechanismFinite element methodPlanarMaterials scienceCapacitanceAcousticsMechanical engineeringStructural engineeringEngineeringComputer sciencePhysicsElectrical engineeringComposite materialPure mathematicsMathematicsPsychologyComputer graphics (images)HomotopyPsychotherapistElectrodeQuantum mechanicsForce Microscopy Techniques and ApplicationsMechanical and Optical ResonatorsPiezoelectric Actuators and Control