Three-dimensional interferometric stage encoder using a single access port
Kieran B. Wiseman, Thomas Kissinger, Ralph P. Tatam
Topics & Concepts
OpticsPlanarInterferometryAstronomical interferometerBeam splitterRotary encoderLinearityEncoderLaserBandwidth (computing)PhysicsComputer scienceTelecommunicationsOperating systemQuantum mechanicsComputer graphics (images)Advanced Measurement and Metrology TechniquesScientific Measurement and Uncertainty EvaluationAdvanced Sensor Technologies Research