Investigation of Fenton-electrochemical oxidation behavior and polishing mechanism of SiC
Huilong Kang, Min Zhong, Xiaobing Li, Meirong Yi, Jianfeng Chen, Wenhu Xu
Topics & Concepts
PolishingElectrochemistryMechanism (biology)Materials scienceChemical engineeringMetallurgyChemistryElectrodePhysical chemistryPhysicsEngineeringQuantum mechanicsAdvanced Surface Polishing TechniquesSemiconductor materials and devicesAdvanced ceramic materials synthesis