X-band Bulk Acoustic Wave Resonator (XBAW) using Periodically Polarized Piezoelectric Films (P3F)
Abhay Kochhar, R. Vetury, Jeff Leathersich, Zachary Schaffer, Craig Moe, D. Kim, K. Cheema, Mary Winters, J.B. Shealy
Abstract
This paper demonstrates the scaling of bulk acoustic wave (BAW) resonator to create micro-acoustic RF filtering solutions in the 8 – 12 GHz range for X band applications using periodically polarized piezoelectric films (P3F). P3F BAW technology overcomes the traditional thickness frequency trade-off of single layer BAW technology. P3F BAW resonators fabricated using XBAW process in the frequency range of 8-10 GHz with FoM (${{\text{k}}_{\text{t}}}^2 \times {{\text{Q}}_{\text{p}}}$ product) of 80-120 are reported in this work.
Topics & Concepts
ResonatorPiezoelectricityMaterials scienceAcousticsScalingAcoustic waveRange (aeronautics)OptoelectronicsPhysicsGeometryComposite materialMathematicsAcoustic Wave Resonator TechnologiesFerroelectric and Piezoelectric MaterialsMechanical and Optical Resonators