Cu thin film growth on stepped Si substrate: Effects of incident energy and thermal annealing
M. Lablali, H. Mes-Adi, Adil Eddiai, Kamal Abderrafi, M. Mazroui
Topics & Concepts
NucleationAnnealing (glass)Materials scienceSurface roughnessSurface energyDislocationThin filmCurvatureSurface finishThermalCondensed matter physicsCrystallographyChemical physicsOpticsComposite materialNanotechnologyChemistryThermodynamicsGeometryPhysicsOrganic chemistryMathematicsMicrostructure and mechanical propertiesMetal and Thin Film MechanicsCopper Interconnects and Reliability