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Temperature compensation for MEMS resonant accelerometer based on genetic algorithm optimized backpropagation neural network

Shudong Wang, Weilong Zhu, Yajing Shen, Juan Ren, Hairong Gu, Xueyong Wei

2020Sensors and Actuators A Physical60 citationsDOI

Topics & Concepts

BackpropagationAccelerometerArtificial neural networkCompensation (psychology)Microelectromechanical systemsAccelerationGenetic algorithmComputer sciencePolynomialBeam (structure)Mode (computer interface)AlgorithmElectronic engineeringMaterials scienceEngineeringMathematicsArtificial intelligencePhysicsOptoelectronicsMachine learningStructural engineeringMathematical analysisPsychologyPsychoanalysisOperating systemClassical mechanicsAdvanced MEMS and NEMS TechnologiesAdvanced Fiber Optic SensorsPhotonic and Optical Devices
Temperature compensation for MEMS resonant accelerometer based on genetic algorithm optimized backpropagation neural network | Litcius