Performance enhancement of solar-blind UV photodetector by doping silicon in β-Ga2O3 thin films prepared using radio frequency magnetron sputtering
Yingnan Zhang, Min Zhang, Wenbo Hu, Liyan Hou, Shang Jiang, Yuxin Wang, Jingchang Sun, Jingchang Sun
Topics & Concepts
Materials scienceOptoelectronicsPhotodetectorSputter depositionDopingSiliconRadio frequencyThin filmSputteringNanotechnologyComputer scienceTelecommunicationsGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques