Characterization of epitaxial layers grown on 4H-SiC (0 0 0 −1) substrates
Junhong Chen, Min Guan, Shangyu Yang, Siqi Zhao, Guoguo Yan, Zhanwei Shen, Wanshun Zhao, Lei Wang, Xingfang Liu, Guosheng Sun, Yiping Zeng
Topics & Concepts
EpitaxyMaterials scienceChemical vapor depositionLayer (electronics)Scanning electron microscopeOptoelectronicsMetalorganic vapour phase epitaxySemiconductorSubstrate (aquarium)Analytical Chemistry (journal)Composite materialChemistryOceanographyChromatographyGeologySilicon Carbide Semiconductor TechnologiesSemiconductor materials and devicesCopper Interconnects and Reliability