Atomic surface of silicon wafers induced by grafted silica nanoparticles and sodium carbonate
Dong Hwan Wang, Wenxiang Xie, Zhenyu Zhang, Jianmei Wang, Chunjing Shi, Fanning Meng, Xuye Zhuang, Dingyi Tong, Chun Cao
Topics & Concepts
Sodium carbonateSiliconNanoparticleWaferCarbonateSodiumMaterials scienceChemical engineeringInorganic chemistrySilicon dioxideChemistryMineralogyNanotechnologyMetallurgyEngineeringAdvanced Surface Polishing TechniquesSilicon Nanostructures and PhotoluminescenceSilicon and Solar Cell Technologies